Encoder head with a birefringent lens element and exposure system utilizing the same

Abstract

An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating. The use of the contraption solves problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head. The contraption is complemented with a birefringent prismatic element positioned across the axis of the contraption between the cuboid and the birefringent lens.

Dependencies are inferred from the claim text.