Back to results
US 10,591,755 B2Granted
Direct-drive polymer modulator methods of fabricating and materials therefor
AssigneeLightwave Logic, Inc.
InventorsRichard Becker, Frederick J Leonberger, Michael Lebby
Life of this patent
Estimating the term…
Abstract
A direct-drive polymer modulator including a platform, a multilayer waveguide formed in/on the platform, the waveguide including a bottom cladding layer, an electro-optic polymer core and a top cladding layer, and at least a portion of the waveguide forming a direct-drive polymer modulator.
Claims20
A direct-drive polymer modulator comprising:
- a platform formed of InP;
- a multilayer waveguide formed in/on the platform, the waveguide including a bottom cladding layer, an electro-optic polymer core and a top cladding layer;
- at least a portion of the waveguide forming a direct-drive polymer modulator;
- a top microstrip conductor overlying at least a portion of the direct-drive polymer modulator;
- and
- an electron blocking layer sandwiched between the top cladding layer and the top microstrip conductor overlying at least the portion of the direct-drive polymer modulator.
3 more elements
A direct-drive polymer modulator comprising:
- a platform;
- a multilayer waveguide formed in/on the platform, the waveguide including a bottom cladding layer, an electro-optic polymer core and a top cladding layer, the bottom cladding layer and the top cladding layer each including electro-optic polymer;
- and
- at least a portion of the waveguide forming a direct-drive polymer modulator.
1 more element
A direct-drive polymer modulator comprising:
- a platform;
- a multilayer waveguide formed in/on the platform, the multilayer waveguide including a bottom electro-optic polymer cladding layer, an electro-optic polymer core and a top electro-optic polymer cladding layer, the electro-optic polymer core having an electro-optic coefficient (r33) greater than 250 pm/V, and a Tg 150° C. to >200° C., and the top and bottom electro-optic polymer cladding layers having a Tg approximately the same as the Tg of the electro-optic polymer core;
- and
- a direct-drive electro-optic polymer modulator formed in the multilayer waveguide.
1 more element
A method of fabricating a direct-drive polymer modulator comprising the steps of:
- providing a platform;
- depositing on the platform a bottom electro-optic polymer cladding layer, an electro-optic polymer core overlying the bottom electro-optic polymer cladding layer, and a top electro-optic polymer cladding layer overlying the electro-optic polymer core forming an electro-optic polymer waveguide, and forming the electro-optic polymer core from materials having an electro-optic coefficient (r33) greater than 250 pm/V, a Tg 150° C. to >200° C. and a resistivity approximately 108 Ohm-cm, and the top and bottom electro-optic polymer cladding layers have a Tg approximately the same as the Tg of the electro-optic polymer core, and a resistivity less than the resistivity of the electro-optic polymer core at poling temperature, and the top and bottom electro-optic polymer cladding layers have levels of conductivity equal to or higher than the electro-optic polymer core;
- forming an electro-optic polymer modulator in the electro-optic polymer waveguide.
Dependencies are inferred from the claim text.