Fabry-Perot interference filter
AssigneeHamamatsu Photonics K.K.
InventorsKatsumi Shibayama, Takashi Kasahara, Masaki Hirose, Toshimitsu Kawai
Life of this patent
Estimating the term…
Abstract
A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
Claims8
A Fabry-Perot interference filter, comprising:
- a fixed mirror;
- and
- a movable mirror disposed opposite to the fixed mirror via an air gap, the distance between the fixed mirror and the movable mirror in a light transmission region being adjusted by electrostatic force applied between at least two driving electrodes,
- wherein a plurality of first annular grooves are concentrically formed in the movable mirror to form an annulus in which the light transmission region is centered, and
- wherein a plurality of first through-holes are formed in the Movable mirror, are open to the air gap side and an opposite side of the air gap, are formed outside of the light transmission region, and wherein at least some of the plurality of first through-holes are formed in a region between adjacent first annular grooves of the plurality of first annular grooves.
A Fabry-Perot interference filter, comprising:
- a fixed mirror;
- and
- a movable mirror disposed opposite to the fixed mirror via an air gap, the distance between the fixed mirror and the movable mirror in a light transmission region being adjusted by electrostatic force applied between at least two driving electrodes,
- wherein a plurality of first annular grooves are concentrically formed in the movable mirror, the light transmission region being centered within an annulus defined by the plurality of first annular grooves,
- the distance between the movable mirror and the fixed mirror across the air gap is larger in the light transmission region than in the region of the first plurality of annular grooves, and
- wherein regardless of whether electrostatic force is applied, a width of the air gap in the light transmission region in a directly opposing direction where the fixed mirror and the movable mirror are opposed is larger than a smallest width of the air gap in the annulus in the directly opposing direction.
Dependencies are inferred from the claim text.