Photonic chip having a monolithically integrated reflector unit and method of manufacturing a reflector unit
AssigneeInstitut National D'Optique
InventorsAlex Paquet, Francois Baribeau
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AssigneeInstitut National D'Optique
InventorsAlex Paquet, Francois Baribeau
Estimating the term…
There is described a method of manufacturing a reflector unit on a photonic chip. The method generally has a step of providing a substrate having a top surface with a region of interest, the region of interest being covered with a bulge of a removable material; monolithically integrating a layer of metallic material over a portion of the top surface adjacent to the bulge and over a portion of the bulge, the layer of metallic material forming a base monolithically integrated to the top surface and a pocket monolithically integrated over the bulge in a manner leaving a portion of the bulge uncovered; and removing the bulge of the removable material to form a reflector unit for reflecting light incoming from the region of interest or towards the region of interest.
A method of manufacturing a reflector unit on a photonic chip, the method comprising:
A method of manufacturing a reflector unit on a photonic chip, the method comprising:
Dependencies are inferred from the claim text.