Automated scan chain diagnostics using emission
AssigneeInternational Business Machines Corporation
InventorsFranco Stellari, Peilin Song
Life of this patent
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Abstract
A method for automated scan chain diagnostics includes segmenting an image of a device associated with a design layout to allocate pixels to individual design elements, comparing actual emission signatures for the individual design elements to expected emission signatures, and determining whether the actual emission signatures differ from the expected emission signatures by more than a threshold amount to determine if a defect is present.
Claims20
A method for automated scan chain diagnostics, comprising:
- segmenting an image of a device registered to a design layout to allocate pixels to individual design elements;
- comparing actual emission signatures for the individual design elements to expected emission signatures;
- and
- determining whether the actual emission signatures differ from the expected emission signatures by more than a threshold amount to determine if a defect is present.
A computer program product comprising a non-transitory computer readable storage medium comprising a computer readable program for automated scan chain diagnostics, wherein the computer readable program when executed on a computer causes the computer to perform a method comprising:
- segmenting an image of a device registered to a design layout to allocate pixels to individual design elements;
- comparing actual emission signatures for the individual design elements to expected emission signatures;
- and
- determining whether the actual emission signatures differ from the expected emission signatures by more than a threshold amount to determine if a defect is present.
A system for automated scan chain diagnostics, comprising:
- at least one processor device configured to:
- segment an image of a device registered to a design layout to allocate pixels to individual design elements;
- compare actual emission signatures for the individual design elements to expected emission signatures;
- and
- determine whether the actual emission signatures differ from the expected emission signatures by more than a threshold amount to determine if a defect is present.
Dependencies are inferred from the claim text.