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US 10,591,523 B2Granted
Capacitive sensor and manufacturing method thereof
AssigneeKorea University Research and Business Foundation
InventorsJames Jungho Pak, Dae Seok Na
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Abstract
A capacitive sensor is disclosed. The capacitive sensor includes a substrate, a first electrode and a second electrode formed on the substrate, an insulation layer formed on the substrate on which the first electrode and the second electrode are formed, and a sensing layer that is formed on the insulation layer and includes graphene.
Claims13
A capacitive sensor comprising:
- a substrate comprising a terminal area and a sensing area;
- a first electrode comprising a first terminal disposed on the terminal area and a first pattern disposed on the sensing area;
- a second electrode separated from the first electrode and comprising a second terminal disposed on the terminal area and a second pattern disposed on the sensing area;
- an insulation layer disposed on the sensing area, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal;
- and
- a sensing layer disposed on the insulation layer and covering at least a portion of the insulation layer such that the sensing layer is insulated and physically separated from the first and second electrodes,
- wherein the sensing layer comprises a graphene.
4 more elements
A method of manufacturing a capacitive sensor, the method comprising:
- disposing at least one electrode comprising a terminal and a pattern on a substrate comprising a terminal area and a sensing area;
- disposing an insulation layer on the sensing area of the substrate, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal;
- and
- disposing a sensing layer on the insulation layer such that the sensing layer covers at least a portion of the insulation layer and is insulated and physically separated from the at least one electrode,
- wherein the sensing layer comprises a graphene, and
- wherein the terminal is disposed on the terminal area and the pattern is disposed on the sensing area.
3 more elements
A method of manufacturing a capacitive sensor, the method comprising:
- disposing at least one electrode comprising a terminal and a pattern on a substrate comprising a terminal area and a sensing area;
- disposing an insulation layer on the sensing area of the substrate, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal;
- and
- disposing a sensing layer on the insulation layer such that the sensing layer covers at least a portion of the insulation layer and is insulated and physically separated from the at least one electrode,
- wherein the sensing layer comprises a graphene;
- wherein the terminal is disposed on the terminal area and the pattern is disposed on the sensing area;
- and
- wherein the disposing the sensing layer comprises:
- screen printing a graphene paste containing the graphene.
6 more elements
Dependencies are inferred from the claim text.