X-ray diffraction measurement method and apparatus
AssigneeHonda Motor Co., Ltd.
InventorsKenji Sato, Kazuhito Nakao
Life of this patent
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Abstract
An X-ray diffraction measurement method includes an arranging step of arranging a shielding plate and a two-dimensional detector on an outgoing optical axis, and a calculating step of calculating a diffraction profile indicating an X-ray intensity with respect to a diffraction angle of the object to be measured, on the basis of a two-dimensional X-ray image detected by the two-dimensional detector. In the arranging step, the shielding plate is arranged in a manner so that the slit is inclined at least in a direction about the outgoing optical axis with respect to an orthogonal direction which is orthogonal to both the incident optical axis and the outgoing optical axis.
Claims7
An X-ray diffraction measurement method for measuring properties of an object to be measured by detecting an X-ray diffraction pattern produced by the object to be measured at an intersecting position where an incident optical axis and an outgoing optical axis intersect one another, comprising:
- an arranging step of arranging on the outgoing optical axis a shielding plate having a linear slit formed therein, and a two-dimensional detector which is capable of detecting within a detection region X-rays that have passed through the slit;
- and
- a calculating step of calculating a diffraction profile indicating an X-ray intensity with respect to a diffraction angle of the object to be measured, on the basis of a two-dimensional X-ray image detected by the two-dimensional detector;
- wherein, in the arranging step, the shielding plate is arranged in a manner so that the slit is inclined at least in a direction about the outgoing optical axis with respect to an orthogonal direction which is orthogonal to both the incident optical axis and the outgoing optical axis.
An X-ray diffraction measurement apparatus adapted to measure properties of an object to be measured by detecting an X-ray diffraction pattern produced by the object to be measured at an intersecting position where an incident optical axis and an outgoing optical axis intersect one another, comprising:
- a shielding plate having a linear slit formed therein;
- a two-dimensional detector which is capable of detecting within a detection region X-rays that have passed through the slit;
- and
- a profile calculating unit adapted to calculate a diffraction profile indicating an X-ray intensity with respect to a diffraction angle of the object to be measured, on the basis of a two-dimensional X-ray image detected by the two-dimensional detector;
- wherein the shielding plate and the two-dimensional detector are disposed respectively on the outgoing optical axis;
- and
- the shielding plate is arranged in a manner so that the slit is inclined at least in a direction about the outgoing optical axis with respect to an orthogonal direction which is orthogonal to both the incident optical axis and the outgoing optical axis.
Dependencies are inferred from the claim text.