Pressure transfer module and pressure measuring transducer having a pressure transfer module

A method for manufacturing a pressure transfer module, comprising:

• a pressure transfer module for transfer of pressures of less than or equal to 100 mbar, comprising:
• an isolating diaphragm outwardly sealing a first pressure chamber and contactable externally with a pressure to be transmitted;
• a transfer diaphragm outwardly sealing a second pressure chamber;
• and a pressure transfer path connecting said first pressure chamber with said second pressure chamber, wherein:
• said first and said second pressure chambers and said pressure transfer path are filled with a pressure transfer liquid, via which a pressure acting externally on said isolating diaphragm is transmitted to said transfer diaphragm;
• the pressure transfer liquid is under a pre-pressure;
• said isolating diaphragm and said transfer diaphragm under the pre-pressure assume a starting position, from which they are deflected by the pressure to be transmitted;
• and the starting positions of said isolating diaphragm and said transfer diaphragm lie as a function of size of the pre-pressure and size of the pressure to be transmitted within deflection ranges of the diaphragms, in which deflections from their starting positions have due to their forming an antisymmetric part, the method comprising:
• manufacturing the isolating diaphragm and transfer diaphragm, wherein their forming is produced by embossing against a correspondingly formed stamp;
• connecting the pre-embossed isolating diaphragm pressure-tightly with a first platform enclosing the first pressure chamber and the pre-embossed transfer diaphragm is connected pressure-tightly with a second platform enclosing the second pressure chamber;
• and
• outwardly sealing an interior of the pressure transfer module by the isolating diaphragm and the transfer diaphragm is filled with the pressure transfer liquid.

A pressure measuring transducer having a transfer module, comprising:

• a pressure transfer module for transfer of pressures of less than or equal to 100 mbar, comprising:
• an isolating diaphragm outwardly sealing a first pressure chamber and contactable externally with a pressure to be transmitted;
• a transfer diaphragm outwardly sealing a second pressure chamber;
• and a pressure transfer path connecting said first pressure chamber with said second pressure chamber, wherein:
• said first and said second pressure chambers and said pressure transfer path are filled with a pressure transfer liquid, via which a pressure acting externally on said isolating diaphragm is transmitted to said transfer diaphragm;
• the pressure transfer liquid is under a pre-pressure;
• said isolating diaphragm and said transfer diaphragm under the pre-pressure assume a starting position, from which they are deflected by the pressure to be transmitted;
• and the starting positions of said isolating diaphragm and said transfer diaphragm lie as a function of size of the pre-pressure and size of the pressure to be transmitted within deflection ranges of the diaphragms, in which deflections from their starting positions have due to their forming an antisymmetric part, wherein:
• the pressure measuring transducer includes a sensor module, which has a receiving body, in which a pressure receiving chamber is enclosed, and
• which is connected pressure-tightly with the transfer module in such a manner that the transfer diaphragm of the pressure transfer module outwardly seals the pressure receiving chamber,
• which has a pressure sensor arranged in a pressure measuring chamber;
• which has a pressure transfer path connecting the pressure receiving chamber with the pressure measuring chamber;
• and
• its pressure receiving chamber, the pressure measuring chamber and the pressure transfer path are filled with a second pressure transfer liquid, via which a pressure transmitted via the transfer diaphragm into the pressure receiving chamber is transmitted to the pressure sensor.