Sensor package with ingress protection
AssigneeKnowles Electronics, LLC
InventorsTony K. Lim, Norman Dennis Talag
Life of this patent
Estimating the term…
Abstract
A sensor device includes a substrate having a front surface and an opposing back surface. The back surface defines an indented region having an indented surface. The substrate defines a bottom port extending between the front surface and the indented surface. The sensor further includes a microelectromechanical systems (MEMS) transducer mounted on the front surface of the substrate over the bottom port. The sensor also includes a filtering material disposed on the indented surface and covering the bottom port. The filtering material provides resistance to ingression of solid particles or liquids into the sensor device. The filtering material is configured to provide high acoustic permittivity and have low impact on a signal-to-noise ratio of the sensor device.
Claims20
A sensor comprising:
- a substrate having a first surface and an opposing second surface, the second surface defining an indented region having an indented surface, the substrate defining a bottom port extending between the first surface and the indented surface;
- a microelectromechanical system (MEMS) transducer mounted on the first surface of the substrate over the bottom port;
- a filtering material disposed on the indented surface and positioned to cover the bottom port, the filtering material structured to prevent ingress of contaminants through the bottom port;
- an integrated circuit (IC) disposed on the substrate;
- and
- a cover disposed over the first surface of the substrate, the cover defining a back volume enclosing the MEMS transducer and the IC.
Dependencies are inferred from the claim text.