Image inspection apparatus
AssigneeKeyence Corporation
InventorDaisuke Ando
Life of this patent
Estimating the term…
Abstract
To make it possible to set a shift direction of phases of illuminance distributions of pattern lights to an appropriate direction and perform an inspection at high accuracy while improving setting flexibility of an illuminating section and an imaging section. A phase shift direction of pattern light irradiated from a pattern light illuminating section is determined according to moving direction information concerning a moving direction of an inspection target object with respect to an array direction of light receiving elements and positional relation information concerning a positional relation between the light receiving elements and the pattern light illuminating section.
Claims6
An image inspection apparatus that inspects a defect of an inspection target object using an image obtained by imaging the inspection target object moving in one direction,
- the image inspection apparatus comprising:
- a pattern light illuminating section for irradiating pattern light having a periodic illuminance distribution on the inspection target object;
- an imaging section configured to be capable of being set independently from the pattern light illuminating section and including a line camera that includes a plurality of image receiving elements arrayed in a line shape and is capable of being set such that an array direction of the light receiving elements is a direction orthogonal to the moving direction of the inspection target object;
- a control section configured to control the pattern light illuminating section and the imaging section to generate a plurality of pattern lights, phases of illuminance distributions of which are shifted in the array direction of the light receiving elements, and a plurality of pattern lights shifted in the moving direction of the inspection target object, sequentially irradiate the pattern lights on the inspection target object, image the inspection target object at timings when the pattern lights are irradiated, and obtain a plurality of luminance images;
- an image generating section configured to generate, on the basis of a deflectometry principle, phase data of a surface of the inspection target object from the plurality of luminance images captured by the imaging section and generate, on the basis of the phase data, an image for inspection indicating a shape of the inspection target object;
- and
- an information acquiring section configured to acquire moving direction information concerning the moving direction of the inspection target object with respect to the array direction of the light receiving elements of the line camera and positional relation information concerning a positional relation between the light receiving elements of the line camera and the pattern light illuminating section, wherein
- the control section is configured to determine, according to the moving direction information and the positional relation information acquired by the information acquiring section, a phase shift direction of the pattern lights irradiated by the pattern light illuminating section so that a proper direction is acquired to obtain the phase data based on the deflectometry principle.
An image inspection apparatus that inspects a defect of an inspection target object using an image obtained by imaging the inspection target object moving in one direction,
- the image inspection apparatus comprising:
- a pattern light illuminating section for irradiating pattern light having a periodic illuminance distribution on the inspection target object;
- an imaging section configured to be capable of being set independently from the pattern light illuminating section and including a line camera that includes a plurality of image receiving elements arrayed in a line shape and is capable of being set such that an array direction of the light receiving elements is a direction orthogonal to the moving direction of the inspection target object;
- a control section configured to control the pattern light illuminating section and the imaging section to generate a plurality of pattern lights, phases of illuminance distributions of which are shifted in the array direction of the light receiving elements and the moving direction of the inspection target object, sequentially irradiate the pattern lights on the inspection target object, image the inspection target object at timings when the pattern lights are irradiated, and obtain a plurality of luminance images;
- an image generating section configured to generate, on the basis of a deflectometry principle, phase data of a surface of the inspection target object from the plurality of luminance images captured by the imaging section and generate, on the basis of the phase data, an image for inspection indicating a shape of the inspection target object;
- and
- an information acquiring section configured to acquire moving direction information concerning the moving direction of the inspection target object with respect to the array direction of the light receiving elements of the line camera and positional relation information concerning a positional relation between the light receiving elements of the line camera and the pattern light illuminating section, wherein
- the image generating section is configured to generate, according to the moving direction information and the positional relation information acquired by the information acquiring section, the image for inspection related to the shape of the inspection target object.
Dependencies are inferred from the claim text.