Integrated optical device for contactless measurement of altitudes and thicknesses

A chromatic confocal measurement apparatus for measuring height configured for measuring simultaneously a plurality of distinct points of an object, and comprising a measurement volume which is defined, in the direction of an optical axis, by an axial chromatic aberration thereof, and in a plane normal to the optical axis, by an image lateral field consisting of a plurality of image points,

• wherein the chromatic confocal measurement apparatus further comprises:
• a measurement head forming a module wholly enclosing:
• at least one polychromatic source configured to generate a plurality of source points either directly under free field conditions or via propagation inside a set of illumination optical fibres;
• a combination/separation assembly for combination and/or separation of beams;
• a set of lenses forming a chromatic optical system configured to accept an object lateral field defined by the plurality of source points, and comprising at least one lens having an extended axial chromatic aberration configured to spectrally split a light generated by the at least one polychromatic source into a continuous spectrum of wavelengths along the optical axis, and configured to form, in a space of the object, an image lateral field, an axial position of which depends on a wavelength of the continuous spectrum of wavelengths;
• a plurality of spatial filters located in a conjugated image plane of the set of lenses and organised strictly identically to the plurality of source points located in the object lateral field, wherein the plurality of spatial filters gives the chromatic confocal measurement apparatus a property of confocality;
• an optoelectronic box enclosing:
• a spectrometer device associated with a photodetector, and configured to image a plurality of spectra corresponding to the plurality of image points;
• a computer configured for at least partially completing one or more of the followings:
• processing the signal, calculation, data transmission, controlling and configuring the chromatic confocal measurement apparatus, the processing including a signal acquisition, and
• an optical cable connecting the measurement head and the optoelectronic box, the optical cable comprising a plurality of optical fibres.

A chromatic confocal measurement apparatus for measuring height wherein the measurement apparatus is configured to measure a plurality of distinct points of an object simultaneously, and comprising a measurement volume which is defined, in a direction of an optical axis, by an axial chromatic aberration, and in a plane normal to the optical axis, by a image lateral field consisting of a plurality of image points, and

• wherein the chromatic confocal measurement apparatus comprises:
• a source box comprising:
• at least one polychromatic source allowing the plurality of source points to be generated either directly under free field conditions or via propagation inside a set of illumination optical fibres,
• an electronic device allowing an intensity and an emission frequency of the at least one polychromatic source to be controlled,
• a power supply,
• a measurement head forming a module wholly enclosing:
• an assembly for combination and/or separation of beams;
• a set of lenses forming a chromatic optical system configured to accept an object lateral field defined by the plurality of source points, and comprising at least one lens having an extended axial chromatic aberration configured to spectrally split a light generated by the at least one polychromatic source into a continuous spectrum of wavelengths along the optical axis, and configured to form, in a space of the object, an image lateral field, an axial position of which depends on a wavelength of the continuous spectrum of wavelengths;
• a spectrometer device associated with a photodetector, configured to image a plurality of spectra corresponding to the plurality of image points forming the image lateral field;
• a plurality of spatial filters located in a conjugated image plane of a set of lenses and organised strictly identically to the plurality of source points located in the object lateral field, wherein this plurality of spatial filters conjugated with the plurality of source points gives the chromatic confocal measurement apparatus a property of confocality;
• and
• a computer configured for at least partially completing one or more of the followings:
• processing the signal, calculation, data transmission, controlling and configuring the chromatic confocal measurement apparatus, the processing including a signal acquisition, and
• an optical cable connecting the chromatic confocal measurement head and the source box, the optical cable comprising a plurality of optical fibres.

A chromatic confocal measurement apparatus for measuring height, wherein the measurement apparatus is configured to measure simultaneously a plurality of distinct points of an object, and comprising a measurement volume which is defined, in a direction of an optical axis, by an axial chromatic aberration thereof, and in a plane normal to the optical axis, by an image lateral field consisting of a plurality of image points, and

• wherein the chromatic confocal measurement apparatus further comprises a measurement head forming a module wholly enclosing:
• at least one polychromatic source allowing a plurality of source points to be generated directly under free field conditions;
• a combination/separation assembly configured to combine and/or separate beams;
• a set of lenses forming a chromatic optical system configured to accept an object lateral field defined by the plurality of source points, and comprising at least one lens having an extended axial chromatic aberration configured to split a light generated by the at least one polychromatic source into a continuous spectrum of wavelengths along the optical axis, and configured to form, in a space of the object, an image lateral field, an axial position of which depends on a wavelength of the continuous spectrum of wavelengths;
• a spectrometer associated with a photodetector, and configured to image a plurality of spectra corresponding to a plurality of image points forming the image lateral field;
• a plurality of spatial filters located in a conjugated image plane of a set of lenses and organised strictly identically to the plurality of source points located in the object lateral field, and wherein the plurality of spatial filters gives the measurement apparatus a property of confocality,
• a computer configured for at least partially completing one or more of the following:
• processing the signal, calculation, data transmission, controlling and configuring the measurement apparatus, the processing including a signal acquisition, the calculation comprising determining a height value for each point of the plurality of distinct points, and,
• wherein at least one polychromatic source is a matrix of micro-LEDs forming the plurality of source points organised according to the object lateral field.