Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device

A vibration-suppressing mechanism to be attached to a charged particle beam device, the vibration-suppressing mechanism comprising:

• a first arcuate member that has an inner wall surface shaped along an outer wall of a column of the charged particle beam device;
• a second arcuate member that has an inner wall surface shaped along an outer wall of a column of the charged particle beam device and is connected with the first arcuate member to form an annular member surrounding the outer wall of the column of the charged particle beam device;
• a first connecting member that fastens one end of the first arcuate member and one end of the second arcuate member together;
• a second connecting member consisting of a hinge connecting the other end of the first arcuate member and the other end of the second arcuate member or a fastening member connecting the other end of the first arcuate member and the other end of the second arcuate member;
• a vibration sensor attached to each of the first arcuate member and the second arcuate member;
• and
• at least two actuators that operate in response to an output of the vibration sensor,
• wherein connection between the one end of the first arcuate member and the one end of the second arcuate member is released by releasing the connection obtained by the first connecting member.