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US 10,590,961 B2Granted
Vacuum pump
AssigneeShimadzu Corporation
InventorShin Sumimoto
Life of this patent
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Abstract
A vibration control mechanism 50 is interposed between a ball bearing 8 and a support section 2a of a base 2. The vibration control mechanism 50 is provided with a plurality of laminated sliding members 51, 52 and an elastic body 53. The vibration control mechanism 50 is provided with the plurality of sliding members 51, 52, and therefore has a plurality of sliding surfaces. As a result, it is possible to enhance a vibration control effect.
Claims10
A vacuum pump whose rotor including an exhaust function section is supported by a ball bearing and is rotated at high speed by a motor to perform evacuation comprising:
- a shaft provided in the rotor;
- a ball bearing attached to the shaft;
- a support member arranged above the ball bearing in an axial direction of the shaft;
- and
- a vibration control mechanism interposed between the support member and the ball bearing, wherein
- the vibration control mechanism includes:
- an elastic body interposed between the support member and the ball bearing, and
- a first sliding member and a second sliding member laminated in an axial direction of the shaft and interposed between the elastic body and the ball bearing, wherein
- the first sliding member is arranged on an upper surface of an outer ring of the ball bearing,
- the second sliding member is arranged on an upper surface of the first sliding member,
- the first sliding member is configured to slide radially relative to the upper surface of the outer ring of the ball bearing when the ball bearing swings in the axial direction,
- the second sliding member is configured to slide radially relative to the first sliding member when the ball bearing swings in the axial direction.
9 more elements
Dependencies are inferred from the claim text.