Turbo-molecular pump
AssigneeShimadzu Corporation
InventorNobuhiko Moriyama
Life of this patent
Estimating the term…
Abstract
A turbo-molecular pump comprises a cylindrical rotor to be rotatably driven by a motor; a cylindrical stator provided corresponding to the rotor; a heater configured to elevate a temperature of the stator to a target temperature; a temperature sensor configured to detect the temperature of the stator; and a control section. A rotation start command is input after start of energization of the heater, the control section stops rotary driving of the rotor at a rated rotation speed until the temperature of the stator reaches a predetermined temperature set lower than the target temperature and begins the rotary driving at the rated rotation speed when the temperature of the stator exceeds the predetermined temperature.
Claims8
A turbo-molecular pump comprising:
- a cylindrical rotor to be rotatably driven by a motor;
- a cylindrical stator provided corresponding to the cylindrical rotor;
- a heater configured to elevate a temperature of the stator to a target temperature;
- a temperature sensor configured to detect the temperature of the stator;
- a controller;
- and
- a rotation start command input to the controller after the heater has been energized, wherein:
- the controller is configured to, upon the rotation start command being input after the energization of the heater, determine whether or not the temperature of the stator exceeds a predetermined temperature set lower than the target temperature,
- the controller is configured to, in the case where it is determined that the temperature of the stator does not exceed the predetermined temperature, stop rotary driving of the cylindrical rotor at a rated rotation speed, and
- the controller is configured to, in the case where it is determined that the temperature of the stator exceeds the predetermined temperature, begin the rotary driving of the cylindrical rotor at the rated rotation speed.
A method for controlling turbo-molecular pump, the turbo-molecular pump including a controller, a cylindrical rotor to be rotatably driven by a motor, and a cylindrical stator provided corresponding to the cylindrical rotor, the method including the steps of;
- elevating a temperature of the stator to a target temperature;
- detecting the temperature of the stator;
- inputting a rotation start command to the controller after elevating the temperature of the stator, and using the controller to determine whether or not the temperature of the stator exceeds a predetermined temperature set lower than the target temperature,
- in the case where it is determined by the controller that the temperature of the stator does not exceed the predetermined temperature, the controller stopping rotary driving of the cylindrical rotor at a rated rotation speed,
- in the case where it is determined by the controller that the temperature of the stator exceed the predetermined temperature, the controller beginning the rotary driving at the rated rotation speed.
Dependencies are inferred from the claim text.