Continuous modification of organics in chemical baths
AssigneeInternational Business Machines Corporation
InventorsCharles L. Arvin, Christopher D. Muzzy
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AssigneeInternational Business Machines Corporation
InventorsCharles L. Arvin, Christopher D. Muzzy
Estimating the term…
A chemical bath system includes a reactor tank configured to store a chemical bath solution including at least one organic element, and an organics removing chamber assembly. The organics removing chamber assembly includes at least one sub-chamber that delivers the chemical bath solution from a high-pressure section of a bath circuit to a low-pressure section. The organics removing chamber assembly modifies an amount of the at least one organic element as the chemical bath solution flows therethrough. The chemical bath system further includes an analysis/dosing controller. The analysis/dosing controller outputs a control signal that controls the organics removing chamber assembly to modify the amount of the at least one organic element in the chemical bath solution based on a comparison between an actual amount of the at least one organic element in the chemical bath solution and a desired amount of the at least one organic element.
A method of modifying organic elements in a chemical bath solution of a chemical bath system, the method comprising:
Dependencies are inferred from the claim text.