Control of additive turnover in an electrodeposition solution
AssigneeECI Technology, Inc.
InventorEugene Shalyt
Life of this patent
Estimating the term…
Abstract
Methods for measuring additive turnover in a solution, such as an electrodeposition solution, are provided. Methods for measuring an age or lifetime of a solution, such as an electrodeposition solution, are also provided. Methods can include providing a solution containing an organic additive and a plurality of breakdown products of the organic additive, in which the plurality of breakdown products include at least one active component and at least one inactive component and measuring the concentration of the at least one inactive component in the solution. Methods can further include determining additive turnover of the solution based on the concentration of the at least one inactive component in the solution.
Claims11
A method for measuring additive turnover of a solution, comprising:
- providing an electrodeposition solution comprising a salt of an organic additive and a plurality of breakdown products of the salt of the organic additive, wherein the plurality of breakdown products comprise at least one inorganic component and at least one organic component;
- measuring a concentration of the at least one inorganic component;
- and
- determining the additive turnover of the solution based on the concentration of the at least one inorganic component in the solution.
Dependencies are inferred from the claim text.