Coating device and coating method
AssigneeMurata Manufacturing Co., Ltd.
InventorToshiki Miyazaki
Life of this patent
Estimating the term…
Abstract
A coating device including a housing case capable of housing therein a plurality of processing targets and configured to coat the plurality of processing targets with a gaseous component by taking gas into the housing case. A rotation body is configured to rotate the housing case. The housing case includes a through-hole for taking gas inside and a stirring plate protruding from an internal wall of the housing case is used to stir the plurality of processing targets.
Claims12
A coating device including a housing case capable of housing a plurality of processing targets therein and configured to coat the plurality of processing targets with a gaseous component by taking gas into the housing case,
- the coating device comprising:
- a rotation unit configured to rotate the housing case;
- a first electrode in which the housing case is placed;
- and
- a second electrode housed inside the housing case,
- wherein
- the housing case includes a through-hole for taking the gas inside, an insulation wall made of electrically insulating material and capable of housing the second electrode inside, and a stirring plate fixed to and protruding from an internal wall of the housing case to stir the plurality of processing targets.
A coating method of coating, by a coating device, a plurality of processing targets with a gaseous component by taking gas into a housing case capable of housing the plurality of processing targets therein, the coating device comprising:
- the housing case;
- a rotation unit configured to rotate the housing case;
- a first electrode in which the housing case is placed;
- and
- a second electrode housed inside the housing case,
- wherein
- the housing case includes a through-hole for taking the gas inside, an insulation wall made of electrically insulating material and capable of housing the second electrode inside, and a stirring plate fixed to and protruding from an internal wall of the housing case to stir the plurality of processing targets, the method comprising:
- taking the gas into the housing case through the through-hole provided in the housing case;
- and
- coating the plurality of processing targets while rotating the housing case housing the plurality of processing targets therein and provided with the stirring plate protruding from the internal wall of the housing case.
A coating device including a housing case capable of housing a plurality of processing targets therein and configured to coat the plurality of processing targets with a gaseous component by taking gas into the housing case,
- the coating device comprising:
- a rotation unit configured to rotate the housing case;
- a first electrode in which the housing case is placed;
- and
- a second electrode housed inside the housing case,
- wherein
- the housing case includes a through-hole for taking the gas inside, and a stirring plate fixed to and protruding from an internal wall of the housing case to stir the plurality of processing targets,
- the housing case includes end faces in a longitudinal direction of the housing case and an outer peripheral wall that is cylindrical, and
- the stirring plate is formed in a helical shape along the internal wall of the housing case, and
- a plurality of through-holes for taking the gas inside are disposed on the end face of the housing case.
Dependencies are inferred from the claim text.