Method of manufacturing display apparatus utilizing mask assembly including intermediate layer and self-assembled monolayer

A method of manufacturing a display apparatus, the method comprising:

• causing, at least in part, a substrate of the display apparatus and a mask to be arranged in a chamber;
• and
• causing, at least in part, a deposition material to be ejected from a deposition source and deposited on the substrate according to an opening in the mask,
• wherein the mask comprises:
• a main body;
• an intermediate layer disposed on at least a portion of the main body;
• and
• a self-assembled monolayer (SAM) disposed on at least a portion of the intermediate layer such that, in a direction normal to a surface of the main body, the intermediate layer is disposed between the SAM and the main body,
• wherein the main body comprises a metal material, and
• wherein the intermediate layer and the SAM completely surround the main body.