Device for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system
AssigneeGrenzebach Maschinenbau GmbH
InventorsOlaf Gawer, Holger Richert, Jens Ellrich
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AssigneeGrenzebach Maschinenbau GmbH
InventorsOlaf Gawer, Holger Richert, Jens Ellrich
Estimating the term…
A device for coating sheet-type substrates, in particular glass panes, in a vacuum coating system is described. The system includes a) a series connection of chambers, through which each substrate sheet passes and which are arranged on the entry side, namely a load lock chamber, a buffer chamber and a transfer chamber, each of which is vacuum-sealable by a check valve. An area of process chambers follows the transfer chamber and the process chamber is followed by a transfer chamber, buffer chamber and load lock chamber. The system also includes b) a conveyor device; c) a vacuum pump with an adapter flange in the region of the buffer chamber; d) at least two flow baffles in the buffer chamber; e) a system for the longitudinal and height displacement of the flow baffles; and f) an assembly for controlling the dynamic processes.
A device for coating planar substrate plates, in a vacuum coating system, said device having the following features:
Dependencies are inferred from the claim text.