Pressurized spray deposition device and method for an organic material steam

A method for pressurized spray deposition of an organic material steam by a pressurized spray deposition device, wherein the pressurized spray deposition deVice comprises an uniform-pressure mixing chamber, an organic material steam source, a high-pressure carrier gas feeding device, a piezoelectric pressurizing deVice and a nozzle, wherein the organic material steam source and the high-pressure carrier gas feeding deVice are connected to the uniform-pressure mixing chamber, an outlet of the uniform-pressure mixing chamber is connected with the nozzle through the piezoelectric pressurizing device, and the pressurized spray deposition deVice further comprises a temperature control element which is disposed in the uniform-pressure mixing chamber,

• wherein the organic material steam source comprises a first organic material steam source, a second organic material steam source and a third organic material steam source, and after mixing in parallel arrangement, the first organic material steam source and the second organic material steam source mix with the third organic material steam source in parallel arrangement, and
• wherein the high-pressure carrier gas feeding deVice is configured to feed a carrier gas to the uniform-pressure mixing chamber, and the organic material steam source is configured to feed organic material steams which are not mixed with the carrier gas to the uniform-pressure mixing chamber, the method comprising steps of:
• heating the organic material to produce an organic material steam and feeding the organic material steam to the uniform-pressure mixing chamber, wherein the organic material steam source comprises a first organic material steam source, a second organic material steam source and a third organic material steam source, and after mixing in parallel arrangement, the first organic material steam source and the second organic material steam source mix with the third organic material steam source in parallel arrangement;
• feeding a carrier gas to the uniform-pressure mixing chamber, to form a carried gas mixture with the organic material steam;
• in the uniform-pressure mixing chamber, regulating the temperature of the carried gas mixture by the temperature control element;
• and
• spraying the carried gas mixture which is mixed uniformly out of the nozzle and towards the deposition substrate by a piezoelectric pressurizing device.