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US 10,590,033 B2Granted
Scratch resistant films and methods of making the same
AssigneeCorning Incorporated
InventorCharles Andrew Paulson
Life of this patent
Estimating the term…
Abstract
An article is provided which includes a substrate and a film disposed on a surface of the substrate. The film includes an aluminum concentration of about 45 atomic % to about 50 atomic %, a nitrogen concentration of about 26 atomic % to about 46 atomic % and an oxygen concentration of from about 4 atomic % to about 24 atomic %. The substrate comprises a bow of less than about 0.0005 meters.
Claims24
An article comprising:
- a substrate;
- and
- a film disposed on a surface of the substrate, the film comprising:
- an aluminum composition of about 45 atomic % to about 50 atomic %;
- a nitrogen composition of about 26 atomic % to about 46 atomic %;
- and
- an oxygen concentration of from about 11.5 atomic % to about 16.5 atomic %, wherein the substrate comprises a bow of less than about 0.0005 meters, and
- further wherein the film comprises a residual stress from about −200 MPa to about +200 MPa.
5 more elements
An article comprising:
- a substrate;
- and
- a film stack disposed on the substrate, the film stack comprising:
- a first layer comprising:
- aluminum;
- nitrogen;
- and
- oxygen, the oxygen at a concentration within the first layer of from about 11.5 atomic % to about 16.5 atomic %;
- a second layer positioned adjacent the first layer and comprising a refractive index of 1.6 or less;
- and
- a third layer positioned within the film stack and comprising the same composition as the first layer, wherein the third layer has a greater thickness than the first layer,
- wherein each of the first and second layers comprises a thickness from about 4 nm to about 100 nm and the third layer comprises a thickness from about 200 nm to about 2 μm,
- wherein the thickness of the third layer is from about 40% to about 99% of the total thickness of the film stack,
- wherein the film stack comprises a residual stress from about −200 MPa to about +200 MPa, and
- further wherein the substrate comprises a bow of less than 0.0005 meters.
12 more elements
An article comprising:
- a substrate;
- and
- a film disposed on the substrate, the film comprising:
- aluminum;
- nitrogen;
- and
- oxygen, the oxygen at a concentration within the film of from about 12.7 atomic % to about 16.5 atomic %, wherein a residual stress in the film is from about −200 MPa to about 0 MPa, and
- further wherein the substrate comprises a bow of less than 0.0005 meters.
5 more elements
Dependencies are inferred from the claim text.