Absolute and differential pressure sensors and related methods
AssigneeSemiconductor Components Industries, LLC
InventorMichael J. Seddon
Life of this patent
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Abstract
Implementations of absolute pressure sensor devices may include a microelectromechanical system (MEMS) absolute pressure sensor coupled over a controller die. The MEMS absolute pressure sensor may be mechanically coupled to the controller die and may also be configured to electrically couple with the controller die. A perimeter of the controller die may be one of the same size and larger than a perimeter of the MEMS absolute pressure sensor. The controller die may be configured to electrically couple with a module through an electrical connector.
Claims13
A differential pressure sensor device comprising:
- a microelectromechanical system (MEMS) differential pressure sensor coupled over an interposer, wherein the interposer comprises an opening therethrough providing fluid access to the MEMS differential pressure sensor;
- and
- a controller die coupled over the interposer;
- wherein the MEMS differential pressure sensor is configured to electrically couple with the controller die;
- and
- wherein the controller die is configured to electrically couple with a module.
A differential pressure sensor device comprising:
- a microelectromechanical system (MEMS) differential pressure sensor coupled over a controller die, wherein the controller die comprises an opening therethrough providing fluid access to the MEMS differential pressure sensor;
- wherein the MEMS differential pressure sensor is configured to electrically couple with the controller die;
- and
- wherein the controller die is configured to electrically couple with a module through an electrical contact.
Dependencies are inferred from the claim text.