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US 10,589,984 B2Granted
MEMS devices and processes
AssigneeCirrus Logic, Inc.
InventorMarek Sebastian Piechocinski
Life of this patent
Estimating the term…
Abstract
The application relates to MEMS microphone transducers having a vent structure provided in the membrane layer and an opening formed at the vent structure for tuning the frequency response of the microphone.
Claims19
A micro-electro-mechanical system (MEMS) transducer comprising:
- a membrane layer;
- and
- a dual flow-path vent structure formed in the membrane layer, wherein the dual flow-path vent structure provides a first flow path through the membrane when the pressure differential across the membrane is below a first threshold, and a second flow path through the membrane when the pressure differential across the membrane is above a second threshold, the first threshold being between 20 uPa and 1 kPa and the second threshold being between 1 kPa and 20 kPa.
Dependencies are inferred from the claim text.