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US 10,589,982 B2Granted
Sensor package having a movable sensor
AssigneePixart Imaging Inc.
InventorsChih-Ming Sun, Ming-Han Tsai, Yu-Tao Lee
Life of this patent
Estimating the term…
Abstract
A sensor package including a fixed frame, a moveable platform, elastic restoring members and a sensor chip is provided. The moveable platform is moved with respect to the fixed frame, and used to carry the sensor chip. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position. The sensor chip is arranged on the elastic restoring members to send detected data via the elastic restoring members.
Claims19
A sensor package, comprising:
- a micro-electromechanical system (MEMS) actuator, comprising:
- a fixed frame comprising silicon layers bonded to each other without an oxide insulating layer therebetween;
- and
- a moveable platform configured to be moved with respect to the fixed frame along at least one direction;
- at least one elastic restoring member connected between the fixed frame and the moveable platform, and configured to restore the moved moveable platform to an original position;
- and
- a sensor chip arranged on the moveable platform, and configured to transmit detected data via the at least one elastic restoring member.
4 more elements
A sensor package, comprising:
- a micro-electromechanical system (MEMS) actuator, comprising:
- a fixed frame comprising a residual silicon layer on the fixed frame without an oxide insulating layer between the fixed frame and the residual silicon layer, and outside the elastic restoring member;
- and
- a moveable platform configured to be moved with respect to the fixed frame along at least one direction;
- at least one elastic restoring member connected between the fixed frame and the moveable platform, and configured to restore the moved moveable platform to an original position;
- and
- a sensor chip arranged on the moveable platform, and configured to transmit detected data via the at least one elastic restoring member.
4 more elements
Dependencies are inferred from the claim text.