Isolated protrusion/recession features in a micro electro mechanical system
AssigneeTexas Instruments Incorporated
InventorsPatrick Ian Oden, James Carl Baker, Sandra Zheng, William C. McDonald
Life of this patent
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Abstract
In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.
Claims7
A microelectromechanical system (MEMS), comprising:
- a substrate;
- a first element mounted on the substrate and having a first wedge shaped protrusion, the first wedge shaped protrusion having a first edge;
- and
- a second element mounted on the substrate and having a second wedge shape protrusion, the second wedge shaped protrusion having a second edge oriented cross-ways to the first edge;
- the first element configured to move in:
- a first direction for the first edge to contact the second edge;
- and a second direction for the first edge to separate from the second edge.
An integrated circuit (IC) comprising:
- a substrate having first and second memory cells;
- and
- first and second pixel modulator elements respectively coupled to the first and second memory cells, each of the first and second pixel modulator elements including:
- a respective landing element mounted on the substrate and having a respective first wedge shaped protrusion, the respective first wedge shaped protrusioln having a respective first edge;
- and a respective tiltable micromirror mounted on the substrate and having a respective second wedge shape protrusion, the respective second wedge shaped protrusion having a respective second edge oriented cross-ways to the respective first edge;
- the respective tiltable micromirror configured to tilt in:
- a first direction for the respective second edge to contact the respective first edge;
- and a second direction for the respective second edge to separate from the respective first edge.
An integrated circuit (IC) comprising:
- a substrate having first and second memory cells;
- and
- first and second pixel modulator elements respectively coupled to the first and second memory cells, each of the first and second pixel modulator elements including:
- a respective landing element mounted on the substrate and having a respective first contact surface;
- and a respective tiltable micromirror mounted on the substrate and having a respective second contact surface, the respective second contact surface including protrusions;
- the respective tiltable micromirror configured to tilt in:
- a first direction for only one of the protrusions to contact the respective first contact surface;
- and a second direction for the respective second contact surface to separate from the respective first contact surface.
Dependencies are inferred from the claim text.