US 10,589,399 B2 · Textured small pad for chemical mechanical polishing

Abstract

A chemical mechanical polishing system includes a substrate support configured to hold a substrate, a polishing pad assembly include a membrane and a polishing pad portion having a polishing surface, a polishing pad carrier, and a drive system configured to cause relative motion between the substrate support and the polishing pad carrier. The polishing pad portion is joined to the membrane on a side opposite the polishing surface. The polishing surface has a width parallel to the polishing surface at least four times smaller than a diameter of the substrate. An outer surface of the polishing pad portion includes at least one recess and at least one plateau having a top surface that provides the polishing surface. The polishing surface has a plurality of edges defined by intersections between side walls of the at least one recess and a top surface of the at least one plateau.

Claims5

Dependent claims

A polishing pad assembly, comprising:

a circular membrane;
and
a polishing pad portion having a perimeter that forms a convex circular shape and having a polishing surface to contact a substrate during a polishing operation, wherein the polishing pad portion has a width at least five times smaller than a width of the membrane, wherein the polishing pad portion is positioned at about a center of the circular membrane, wherein an upper surface of the polishing pad portion includes one or more recesses and one or more plateaus having a top surface that provides the polishing surface, wherein the one or more recesses comprise a first plurality of parallel grooves and a second plurality of parallel grooves perpendicular to the first plurality of parallel grooves, and wherein the polishing surface has a plurality of edges defined by intersections between side walls of the one or more recesses and the top surface of the one or more plateaus.

Dependencies are inferred from the claim text.

Textured small pad for chemical mechanical polishing

Life of this patent

Textured small pad for chemical mechanical polishing

Life of this patent

Abstract

Claims5