Three dimensional nanometer filters and methods of use
AssigneeImagine TF, LLC
InventorBrian Edward Richardson
Life of this patent
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Abstract
Three dimensional nanoparticle filters are provided herein. In one embodiment a filter device includes a base material, alternating layers of sacrificial material between layers of structural material being deposited onto the base material to create a layered base material, and filter sidewalls etched into the deposited alternating layers of the layered base material to remove the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls as well as create channels between the filter sidewalls, where a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.
Claims20
A method for creating a filter panel, comprising:
- providing a substrate panel;
- and
- creating at least one filter sidewall on a surface of the substrate panel by:
- alternatingly depositing layers of structural material and sacrificial material;
- and
- etching away at least a portion of each of the layers of sacrificial material to create spacers that separate the layers of structural material, and to create filter slots.
A filter panel, comprising:
- a substrate panel;
- and
- at least one filter sidewall on a surface of the substrate panel comprising:
- alternatingly depositing layers of structural material and sacrificial material;
- and
- filter slots created from etching away at least a portion of each of the layers of sacrificial material to create spacers that separate the layers of structural material, and to create filter slots.
Dependencies are inferred from the claim text.