Metering valve for a metered dose inhaler

An aerosol dispensing apparatus comprising:

• an aerosol container;
• a discharge piece movably mounted to the aerosol container;
• a metering valve mounted within the discharge piece;
• a battery;
• and
• an electronically actuated micro-machined silicon sliding plate microvalve electronically connected to the battery and in fluid communication with the metering valve, wherein the metering valve is movable between an open position wherein a volume of an aerosol formulation is directed from the aerosol container through the metering valve to the electronically actuated micro-machined silicon sliding plate microvalve, and a closed position wherein the aerosol formulation is not permitted to flow through the metering valve, and wherein the electronically actuated micro-machined silicon sliding plate microvalve is configured to precisely control a flow of the aerosol formulation outward of the discharge piece;
• wherein the silicon sliding plate microvalve comprises:
• a base plate defining a plane and including a surface, a first recessed area provided within the surface, and a fluid port provided within the first recessed area;
• a cover plate defining a plane and including a surface, a second recessed area provided within the surface and defining an actuator cavity, and a third recessed area provided within the second recessed area;
• and
• an intermediate plate defining a plane;
• wherein the intermediate plate has a first surface that abuts the surface of the base plate and a second surface that abuts the surface of the cover plate, the intermediate plate including a displaceable member that is slidably movable relative to the base and cover plates, the sliding movement of the displaceable member occurring within the plane defined by the intermediate plate and parallel to the planes defined by the base and cover plates, wherein the displaceable member is movable between a closed position wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve, the displaceable member including an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion, the actuator ribs having a first portion and a second portion, the first portion having a first end and a second end, the second end of the first portion connected to the central spine, the second portion having a first end and a second end, the second end of the second portion connected to the central spine.