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US 10,586,909 B2Granted
Cryogenic electronic packages and assemblies
AssigneeMassachusetts Institute of Technology
InventorsRabindra N. Das, Eric A. Dauler
Life of this patent
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Abstract
A cryogenic electronic package includes a circuitized substrate, an interposer, a superconducting multichip module (SMCM) and at least one superconducting semiconductor structure. The at least one superconducting semiconductor structure is disposed over and coupled to the SMCM, and the interposer is disposed between the SMCM and the substrate. The SMCM and the at least one superconducting semiconductor structure are electrically coupled to the substrate through the interposer. A cryogenic electronic assembly including a plurality of cryogenic electronic packages is also provided.
Claims10
A cryogenic electronic package, comprising:
- a conventional and/or superconducting circuitized substrate having first and second opposing surfaces and including one or more interconnect pads disposed on at least one of the first and second surfaces;
- an interposer having first and second opposing surfaces and including one or more interconnect pads disposed on at least one of the first and second surfaces, wherein the first surface of the interposed is disposed over and coupled to the second surface of the substrate;
- a first superconducting multichip module (SMCM) having first and second opposing surfaces, wherein the first surface of the first SMCM is disposed directly on the second surface of the interposer and the second surface of the first SMCM is electrically coupled to the second surface of the interposer;
- at least one first superconducting semiconductor structure having first and second opposing surfaces, wherein the first surface of the at least one first superconducting semiconductor structure is disposed over and coupled to the second surface of the first SMCM, and the first SMCM and the at least one first superconducting semiconductor structure are electrically coupled to the substrate through the interposer, wherein the interposer redistributes wirings of the first SMCM such that the interposer is capable of utilizing substantially all real estate of the circuitized substrate below the first surface of the first SMCM in order to miniaturize the cryogenic electronic package;
- one or more first interconnect structures disposed between the second surface of the substrate and the first surface of the interposer and coupled to respective ones of the interconnect pads provided on the substrate and the interposer to form one or more electrical connections between the interposer and the substrate;
- one or more second interconnect structures disposed between the second surface of the first SMCM and the first surface of the at least one first superconducting semiconductor structure and coupled to form one or more electrical connections between the at least one first superconducting semiconductor structure and the first SMCM;
- an adhesive layer disposed between the second surface of the interposer and the first surface of the first SMCM;
- and
- one or more conventional and/or superconducting wire bonding and/or ribbon bonding and/or spring bonding structures, wherein at least one of the bonding structures has a first portion electrically coupled to the second surface of the interposer, and a second opposing portion electrically coupled to the second surface of the first SMCM to form one or more electrical connections between the interposer and the first SMCM.
6 more elements
A cryogenic electronic assembly, comprising:
- a plurality of cryogenic electronic packages, each comprising:
- a substrate having first and second opposing and including one or more interconnect pads disposed on at least one of the first and second surfaces
- an interposer having first and second opposing surfaces and including one or more interconnect pads disposed on at least one of the first and second surfaces;
- a superconducting multichip module (SMCM) having first and second opposing surfaces;
- at least one superconducting semiconductor structure having first and second opposing surfaces;
- one or more first interconnect structures, each of the first interconnect structures disposed between the substrate and the interposer and coupled to respective ones of the interconnected pads disposed on the substrate and the interposer;
- and
- one or more second interconnect structures disposed between the second surface of the SMCM and the first surface of the at least one superconducting semiconductor structure and coupled to form one or more electrical connections between the at least one superconducting semiconductor structure and the SMCM;
- one or more third interconnect structures disposed directly on the second surface of the SMCM and the second surface of the interposer and coupled to form one or more electrical connections between the interposer and the SMCM,
- wherein the at least one superconducting semiconductor structure and the SMCM are electrically coupled to the substrate through the interposer;
- means for electrically coupling the cryogenic electronic packages together through the first surface of the superconducting semiconductor structure, the second surface of the SMCM, the second surface of the interposer, the first surface of the interposer, and the second surface of the substrate;
- wherein the means for electrically coupling the cryogenic electronic packages together comprises at least one connector having a first and second opposing portions, wherein the first portion of the at least one connector is coupled to a selected one of the interconnect pads provided on the substrate of a first selected one of the cryogenic electronic packages, and the second portion of the at least one connector is coupled to a selected one of the interconnect pads provided on the substrate of a second selected one of second cryogenic electronic packages, wherein the at least one connector comprise at least one of a flex connector, a ribbon connector, a coaxial connector, an optical connector or an optoelectronic connector;
- an adhesive layer disposed between the second surface of the interposer and the first surface of the SMCM;
- and
- one or more wire bonding structures, wherein at least one of the wire bonding structures has a first portion electrically coupled to the second surface of the interposer, and a second opposing portion electrically coupled to the second surface of the SMCM to form one or more electrical connections between the interposer and the SMCM.
12 more elements
Dependencies are inferred from the claim text.