High refractive index waveguides and method of fabrication
AssigneeThe Trustees of the University of Pennsylvania
InventorsLee Bassett, Richard Grote
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Abstract
Optical component and methods for forming optical components are described. The optical component includes a substrate having a base and a fin extending from the base, a buffer layer formed on the substrate leaving a portion of the fin exposed, and a confinement layer deposited over the buffer layer and the fin. The refractive index of the substrate is greater than the refractive index of the confinement layer, and the refractive index of the confinement layer is greater than the refractive index of the buffer layer.
Claims6
A method for fabricating an optical component, comprising:
- forming, on a substrate having a base and a fin extending from the base, a buffer layer leaving a portion of the fin exposed and having sides and a top, each of which extends above the buffer layer, the substrate having a first refractive index and the buffer material having a second refractive index;
- and
- depositing a confinement layer over the buffer layer and directly on the sides and the top of the portion of the fin that extends above the buffer layer to form an optical waveguide, the confinement layer having a third refractive index;
- wherein the first refractive index is greater than the third refractive index, and the third refractive index is greater than the second refractive index.
An optical component, comprising:
- a substrate having a base and a fin extending from the base, the substrate having a first refractive index;
- a buffer layer formed on the substrate leaving a portion of the fin exposed and having sides and a top, each of which extends above the buffer layer, the buffer layer having a second refractive index;
- and
- a confinement layer deposited over the buffer layer and directly on the sides and the top of the portion of the fin that extends above the buffer layer, the confinement layer having a third refractive index;
- wherein the first refractive index is greater than the third refractive index, and the third refractive index is greater than the second refractive index.
Dependencies are inferred from the claim text.