X-ray emission spectrometer system

An x-ray spectrometer comprising:

• at least one x-ray optical train configured to receive fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and to focus at least some of the received fluorescence x-rays to a focal spot;
• at least one spatially-resolving x-ray detector;
• and
• at least one x-ray analyzer curved in at least one plane, the at least one x-ray analyzer configured to receive and diffract at least some of the focused fluorescence x-rays with x-rays of different wavelengths diffracted to different locations on the at least one spatially-resolving x-ray detector, wherein the at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on a Rowland circle.

A method for x-ray emission spectroscopy, the method comprising:

• irradiating a first side of a sample with a focused x-ray beam having a focal spot;
• receiving fluorescence x-rays emitted from the first side of the sample;
• and
• diffracting, using at least one x-ray analyzer, at least some of the received fluorescence x-rays such that fluorescence x-rays with different wavelengths are diffracted towards different portions of at least one spatially-resolving x-ray detector, wherein the focal spot, the at least one x-ray analyzer, and the at least one spatially-resolving x-ray detector are positioned in an off-Rowland circle geometry.

A method for x-ray emission spectroscopy, the method comprising:

• receiving fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope;
• focusing at least some of the received fluorescence x-rays to a focal spot;
• and
• diffracting, using at least one x-ray analyzer, at least some of the focused fluorescence x-rays such that fluorescence x-rays with different wavelengths are diffracted towards different portions of at least one spatially-resolving x-ray detector;
• wherein the at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on a Rowland circle.