Electron guns for electron beam tools
AssigneesNuFlare Technology, Inc., NuFlare Technology America, Inc.
InventorVictor Katsap
Life of this patent
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Abstract
An electron emission apparatus, an electron gun, and a method of fabrication of the electron gun are provided. The electron gun includes a cathode, a Wehnelt, and an anode. The cathode is configured to provide an electron beam. The Wehnelt has a bore. The bore is configured to pass the electron beam. The anode is disposed proximate to the cathode. The diameter of the bore of the Wehnelt and the offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship. The predetermined dimensional relationship is at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode.
Claims15
An electron gun, comprising:
- a cathode configured to provide an electron beam;
- a Wehnelt having a bore, the bore being configured to pass the electron beam, the Wehnelt being offset from the cathode;
- and
- an anode having a bore disposed proximate to the Wehnelt,
- wherein a diameter of the bore of the Wehnelt and an offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship, the predetermined dimensional relationship being at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode, a first function of the diameter of the bore of the Wehnelt divided by the offset being greater than a second function of a sum of the diameter of the bore of the anode and the distance between the Wehnelt and the anode, and
- wherein the offset is between a front face of the cathode and a front face of the Wehnelt, the Wehnelt facing a back face of the anode.
An electron emission apparatus, comprising:
- an electron gun including
- a cathode configured to provide an electron beam,
- a Wehnelt having a bore configured to pass the electron beam, the Wehnelt being offset from the cathode, and
- an anode having a bore disposed proximate to the Wehnelt,
- wherein a diameter of the bore of the Wehnelt and an offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship, the predetermined dimensional relationship being at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode, a first function of the diameter of the bore of the Wehnelt divided by the offset being greater than a second function of a sum of the diameter of the bore of the anode and the distance between the Wehnelt and the anode, and
- wherein the offset is between a front face of the cathode and a front face of the Wehnelt, the Wehnelt facing a back face of the anode.
Dependencies are inferred from the claim text.