# US 10,573,479 B2 · MEMS membrane with integrated transmission line

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,573,479 B2
- Document ID: US10573479B2
- Status: Granted
- Kind: B2
- Application number: 16/304,274
- Filed: 2017-05-19
- Published: 2019-03-21
- Granted: 2020-02-25
- Earliest claimed: 2016-05-24
- Assignees: Airmems
- Applicants: Airmems
- Inventors: Romain Stefanini; Ling Yan Zhang; Abedel Halim Zahr
- Web page: https://patentgrep.com/patent/US10573479B2

## CPC

- H01H 59/0009: {making use of micromechanics}
- B81B 2201/01: Switches
- B81B 2203/01: Suspended structures, i.e. structures allowing a movement
- H01H 2001/0084: {with perpendicular movement of the movable contact relative to the substrate}
- H01H 2059/0027: {Movable electrode connected to ground in the open position, for improving isolation}
- H01H 2239/004: High frequency adaptation or shielding
- H01H 2239/018: Ground conductor
- H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

A micro-electromechanical-system (MEMS) switch (1) is formed in a substrate (2) and includes a first RF signal line (3) and a second RF signal line (4), a deformable membrane (5), an activator (7) configured to deform the membrane (5), a substrate track, and a membrane track. The RF signal lines (3, 4) are connected by one of the membrane track and the substrate track. A membrane RF ground (9, 10) is integrated into the membrane (5), and the membrane RF ground is electrically connected to a substrate RF ground (11, 12, 3, 14), the membrane RF ground framing and being formed parallel to at least one among the membrane track (8) and the substrate track, such that the RF ground (9, 10) closely follows the RF signal path, in order to guide the propagation of the RF signal of the first RF signal line (3) to the second RF signal line (4) when the switch is in the on state.

## Claims

### Claim 1

A micro-electromechanical switch (MEMS) formed on a substrate, the micro-electromechanical switch comprising:
a first RF signal line and a second RF signal line formed on the substrate;
a deformable membrane made from a highly resistive material, the membrane being kept, in a non-deformed state, spaced away from the substrate by anchors secured to the substrate,
an activation means configured to deform the membrane from its nondeformed state,
a substrate track formed on the substrate, opposite the membrane,
a membrane track integrated into the membrane and bearing a conductive contact zone opposite the substrate track configured to produce a conductive contact between the substrate track and the membrane track in a deformed state of the membrane, the first RF signal line and the second RF signal line being connected by means of at least one from among the membrane track and the substrate track, the switch being in the on state when a signal is capable of circulating from the first RF signal line to the second RF signal line, and in the off state when a signal cannot circulate from the first RF signal line to the second RF signal line,
wherein a membrane RF ground is integrated into the membrane, the membrane RF ground being electrically connected to an RF substrate ground by means of anchors, the membrane RF ground framing and being formed parallel to at least one from among the membrane track and the substrate track, such that the RF ground closely follows the RF signal path, to guide the propagation of the RF signal from the first RF signal line to the second RF signal line when the switch is in the on state.

### Claim 2 (depends on 1)

The micro-electromechanical switch (MEMS) according to claim 1, wherein the first RF signal line and the second RF signal line are connected by the membrane track, the substrate track being connected to the RF ground, the off state of the switch being made in the deformed state of the membrane, and the on state of the switch being made in the nondeformed state of the membrane.

### Claim 3 (depends on 1)

The micro-electromechanical switch according to claim 1, wherein the contact zone of the membrane is a contact pin protruding from the lower face of the membrane to provide conductive physical contact of the contact pin with the substrate track in the deformed state of the membrane.

### Claim 4 (depends on 1)

The micro-electromechanical switch according to claim 1, wherein the membrane is made up of a dielectric material with an electric resistance greater than 5×104 Ohms·cm.

### Claim 5 (depends on 1)

The micro-electromechanical switch according to claim 1, wherein the membrane RF ground is on the lower face of the membrane, opposite the substrate.

### Claim 6 (depends on 1)

The micro-electromechanical switch (MEMS) according to claim 1, wherein the first RF signal line and the second RF signal line are connected by the substrate track, the membrane track being connected to the RF ground, the off state of the switch being made in the deformed state of the membrane, and the on state of the switch being made in the nondeformed state of the membrane.

### Claim 7 (depends on 6)

The micro-electromechanical switch according to claim 6, wherein the membrane RF ground is made up of two RF ground tracks located on either side of the substrate track.

### Claim 8 (depends on 1)

The micro-electromechanical switch (MEMS) according to claim 1, wherein the membrane track is connected at one end to the first RF signal line and the substrate track is connected to the second RF signal line, the on state of the switch being made in the deformed state of the membrane, and the off state of the switch being made in a nondeformed state of the membrane.

### Claim 9 (depends on 8)

The micro-electromechanical switch according to claim 8, wherein the micro-electromechanical switch further comprises at least one from among a second membrane track and a second membrane RF ground formed symmetrically to the membrane track relative to a plane parallel to the substrate and median along the thickness of the membrane, and the second RF ground being symmetrical to the membrane RF ground relative to a plane parallel to the substrate and median along the thickness of the membrane.

### Claim 10 (depends on 8)

The micro-electromechanical switch (MEMS) according to claim 8, wherein the first RF signal line and the second RF signal line are coplanar, the membrane is rounded, kept spaced away from the substrate by five anchors formed on the substrate, the electrostatic actuation means being made up of an electrostatic activation electrode formed on the substrate opposite the membrane and power supplied by an activation line, the activation electrode being configured, when it is activated by the activation line, to bring the membrane to its deformed state.

### Claim 11 (depends on 8)

The micro-electromechanical switch according to claim 8, wherein the membrane RF ground is made up of two RF ground tracks located on either side of the membrane track.

### Claim 12 (depends on 11)

The micro-electromechanical switch according to claim 11, wherein the membrane track and the two RF ground tracks are in a same plane parallel to the substrate.

### Claim 13 (depends on 8)

The micro-electromechanical switch according to claim 8, wherein the membrane RF ground further comprises at least one from among an RF ground track located above the membrane track track and an RF ground track located below the membrane track, the RF ground track of the membrane RF ground located above the membrane track extending over at least part of the width of the membrane between the anchors and the end of the membrane track connected to the contact zone, and the RF ground track of the membrane RF ground located below the membrane track extending over at least part of the width of the membrane between the anchors and the end of the membrane track connected to the contact zone, leaving the contact zone free.

### Claim 14 (depends on 13)

The micro-electromechanical switch according to claim 13, wherein the RF ground tracks of the membrane RF ground are connected by vias in the membrane formed on either side of the conductive track.