US 10,573,447 B2 · Thin film magnet and method for manufacturing thin film magnet

Abstract

A thin film magnet includes a substrate, an oxidation-inhibiting layer in an amorphous state disposed on an upper surface of the substrate, a first magnetic layer disposed on the oxidation-inhibiting layer, an intermediate layer disposed on the first magnetic layer, a second magnetic layer disposed on the intermediate layer, and a second oxidation-inhibiting layer in an amorphous state disposed above the second magnetic layer. The intermediate layer contains metal particles. The metal particles are diffused in the first magnetic layer and the second magnetic layer. The concentration of the metal particles in a part of the first magnetic layer decreases as the distance from the intermediate layer to the part of the first magnetic layer increases. The concentration of the metal particles in a part of the second magnetic layer decreases as the distance from the intermediate layer to the part of the second magnetic layer increases.

Claims21

Dependent claims

A thin film magnet comprising:

a substrate;
a first oxidation-inhibiting layer in an amorphous state disposed on an upper surface of the substrate;
a first magnetic layer disposed on the first oxidation-inhibiting layer;
a first intermediate layer disposed on the first magnetic layer, the first intermediate layer containing first metal particles;
a second magnetic layer disposed on the first intermediate layer;
and
a second oxidation-inhibiting layer in an amorphous state disposed above the second magnetic layer, wherein
the first metal particles are diffused in a part of the first magnetic layer and the second magnetic layer,
a concentration of the first metal particles in a part of the first magnetic layer decrease as a distance from the first intermediate layer to the part of the first magnetic layer increases, and
a concentration of the first metal particles in a part of the second magnetic layer decrease as a distance from the first intermediate layer to the part of the second magnetic layer increases.

7 more elements

A method for manufacturing a thin film magnet, the method comprising:

forming a first oxidation-inhibiting layer in an amorphous state on an upper surface of a substrate;
forming a first magnetic layer on the first oxidation-inhibiting layer;
forming an intermediate layer on the first magnetic layer, the intermediate layer containing metal particles;
forming a second magnetic layer on the intermediate layer;
forming a second oxidation-inhibiting layer in an amorphous state above the second magnetic layer;
and
performing heat treatment to the first oxidation-inhibiting layer, the first magnetic layer, the intermediate layer, the second magnetic layer, and the second oxidation-inhibiting layer, wherein
the first metal particles are diffused in a part of the first magnetic layer and the second magnetic layer,
a concentration of the first metal particles in a part of the first magnetic layer decrease as a distance from the first intermediate layer to the part of the first magnetic layer increases, and
a concentration of the first metal particles in a part of the second magnetic layer decrease as a distance from the first intermediate layer to the part of the second magnetic layer increases.

7 more elements

Dependencies are inferred from the claim text.

Thin film magnet and method for manufacturing thin film magnet

Life of this patent

Thin film magnet and method for manufacturing thin film magnet

Life of this patent

Abstract

Claims21