Method of fabricating a color filter array using a multilevel structure
AssigneeApplied Materials, Inc.
InventorsCarl P. Taussig, Edward Robert Holland, Ping Mei, Richard E. Elder
Life of this patent
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Abstract
A method of fabricating a color filter array including providing substrate, forming a multilevel structure that is attached to the substrate, etching the multilevel structure to expose first wells in the multilevel structure, filling at least the first wells in the multilevel structure with the first color component, curing the first color component, etching the multilevel structure to expose second wells in the multilevel structure, filling at least the second wells in the multilevel structure with a second color component, and curing the second color component.
Claims15
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- a blocking layer, wherein the ribs are formed over the blocking layer, and the blocking layer is visible through the ribs, and wherein the blocking layer is attached to the bottom side of the structure, and the top side of the structure is opposite the bottom side, wherein the first and second wells are defined by the ribs and the blocking layer.
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- a blocking layer, wherein the ribs are formed over the blocking layer, and the blocking layer is visible through the ribs, and wherein the blocking layer is attached to the bottom side of the structure, and the top side of the structure is opposite the bottom side, wherein a substrate defines a floor of the first and second wells.
A color filter array comprising:
- a structure having a top side and a bottom side and including ribs that define first wells and second wells in the structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the structure;
- a second color component in the second wells and substantially planar with the top side of the structure;
- and
- a substrate structure including a first conductive layer, a second conductive layer, and a dielectric layer disposed between the first conductive layer and the second conductive layer, wherein the first conductive layer, the second conductive layer and the dielectric layer are arranged on a same side of the color filter array, and wherein a bottom side of each of the ribs is attached to the second conductive layer, and wherein the second conductive layer is transparent to visible light.
A color filter array comprising:
- a well structure having a top side and a bottom side and including ribs that define first wells and second wells in the well structure, wherein a top side of each rib is planar;
- a first color component in the first wells and substantially planar with the top side of the well structure;
- a second color component in the second wells and substantially planar with the top side of the well structure;
- an opaque layer that provides black lines between the first color component and the second color component, the opaque layer providing a black matrix visible through the ribs;
- and
- a substrate structure attached to the bottom side of the well structure, and the top side of the well structure is opposite the bottom side.
Dependencies are inferred from the claim text.