Leak check system and method of checking leak using the same

A leak check system configured to supply air to an inspection target space of an object to be inspected and check a leak based on a pressure change of the inspection target space, the leak check system comprising:

• a pedestal;
• a robotic arm including a plurality of arm bodies serially coupled from the pedestal;
• a robot control device configured to control operation of the robotic arm;
• an air supply hand having an air discharge part connected to the object to be inspected to discharge air into the inspection target space, the air supply hand being attachably and detachably attached to a tip-end part of the robotic arm;
• an air supply source;
• an air supply pipe configured to lead air from the air supply source to the air discharge part, the air supply pipe including an upstream air supply pipe and a downstream air supply pipe, the upstream air supply pipe extending from the air supply source to the pedestal and further extending from the pedestal along the robotic arm, the downstream air supply pipe being provided at the air supply hand and including a first end connected to the air discharge part and a second end connected to the upstream air supply pipe when the air supply hand is attached to the tip-end part of the robotic arm;
• a pressure sensor provided to the air supply pipe, the pressure sensor being configured to transmit detected pressure data to the robot control device;
• an air supply mechanism controlled by the robot control device to control supply of air from the air supply source to the air discharge part;
• and
• a plug attachment-and-detachment hand, wherein:
• the object to be inspected has a plurality of openings that communicate the inspection target space with an exterior of the object,
• the plurality of openings include a first opening connected to the air discharge part, and at least one second opening, which is different than the first opening,
• the plug attachment-and-detachment hand is configured to attach a plug to the second opening to block the second opening,
• the robot control device controls the robotic arm such that the plug is attached to the second opening,
• the robot control device controls the robotic arm such that after the plug is attached to the second opening, the plug attachment-and-detachment hand is replaced with the air supply hand,
• the robot control device controls the robotic arm such that the air discharge part is connected to the first opening,
• the robot control device controls the air supply mechanism such that the discharge of air from the air discharge part to the inspection target space is started, and
• the robot control device determines the leak from the inspection target space based on the pressure data transmitted by the pressure sensor.