Heat treatment apparatus

Abstract

A heat treatment apparatus is configured to perform a heat treatment on a workpiece while rotating the workpiece. The heat treatment apparatus includes a rotary shaft configured to support the workpiece and on which a discharge nozzle is provided to spray cooling liquid toward the workpiece, a fixing base having a supply port and a discharge port for the cooling liquid, a coupling section coupling the fixing base and the rotary shaft to each other in a relatively rotatable manner, and a detector configured to detect a flow of the cooling liquid discharged from the discharge port. A supply passage and a discharge passage are formed inside the fixing base, the rotary shaft and the coupling section. The supply passage extends from the supply port and to the discharge nozzle. The discharge passage branches from the supply passage inside the rotary shaft and leads to the discharge port.

Dependencies are inferred from the claim text.