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US 10,567,886 B2Granted
Sound transducer structure and method for manufacturing a sound transducer structure
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Stefan Barzen, Marc Fueldner
Life of this patent
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Abstract
For manufacturing a sound transducer structure, membrane support material is applied on a first main surface of a membrane carrier material and membrane material is applied in a sound transducing region and an edge region on a surface of the membrane support material. In addition, counter electrode support material is applied on a surface of the membrane material and recesses are formed in the sound transducing region of the membrane material. Counter electrode material is applied to the counter electrode support material and membrane carrier material and membrane support material are removed in the sound transducing region to the membrane material.
Claims20
A method for manufacturing a sound transducer structure, the method comprising:
- applying a closed contour of a predetermined height of additional membrane support material on a first main surface of a membrane carrier material in a sound transducing region;
- applying membrane support material on the first main surface of the membrane carrier material;
- applying membrane material in the sound transducing region and an edge region on a first main surface of the membrane support material, such that the membrane support material is disposed at least in part between the membrane carrier material and the membrane material;
- applying counter electrode support material on a first main surface of the membrane material, such that the membrane material is disposed at least in part between the membrane support material and the counter electrode support material;
- producing a plurality of recesses in a first main surface of the counter electrode support material opposite the first main surface of the membrane material in the sound transducing region;
- applying counter electrode material on the first main surface of the counter electrode support material;
- and
- removing membrane carrier material and membrane support material in the sound transducing region to a second main surface of the membrane material abutting on the first main surface of the membrane support material.
5 more elements
A method for manufacturing a sound transducer structure, the method comprising:
- applying membrane support material on a first main surface of a membrane carrier material;
- applying membrane material in a sound transducing region and an edge region on a first main surface of the membrane support material, such that the membrane support material is disposed at least in part between the membrane carrier material and the membrane material;
- applying counter electrode support material on a first main surface of the membrane material, such that the membrane material is disposed at least in part between the membrane support material and the counter electrode support material;
- producing a plurality of recesses in a first main surface of the counter electrode support material opposite the first main surface of the membrane material in the sound transducing region, the recesses comprising an extension between 0.5 μm and 3 μm in a direction parallel to the first main surface of the counter electrode support material and an extension between 0.5 μm and 1.5 μm in a direction perpendicular to the first main surface of the counter electrode support material are produced in the counter electrode support material;
- applying counter electrode material on the first main surface of the counter electrode support material;
- and
- removing membrane carrier material and membrane support material in the sound transducing region to a second main surface of the membrane material abutting on the first main surface of the membrane support material.
4 more elements
A method for manufacturing a sound transducer structure, the method comprising:
- applying a closed contour of a predetermined height of additional membrane support material on a first main surface of a membrane carrier material in a sound transducing region;
- applying membrane support material on the first main surface of the membrane carrier material;
- applying membrane material in the sound transducing region and an edge region on a first main surface of the membrane support material, such that the membrane support material is disposed at least in part between the membrane carrier material and the membrane material;
- applying counter electrode support material on a first main surface of the membrane material, such that the membrane material is disposed at least in part between the membrane support material and the counter electrode support material;
- producing a plurality of recesses in a first main surface of the counter electrode support material opposite the first main surface of the membrane material in the sound transducing region, the recesses comprising an extension between 0.5 μm and 3 μm in a direction parallel to the first main surface of the counter electrode support material and an extension between 0.5 μm and 1.5 μm in a direction perpendicular to the first main surface of the counter electrode support material are produced in the counter electrode support material;
- applying counter electrode material on the first main surface of the counter electrode support material;
- applying stability improvement material between the counter electrode support material and a second main surface of the counter electrode material opposite the first main surface of the counter electrode material, the stability improvement material comprising a greater mechanical stability than the counter electrode material;
- and
- removing membrane carrier material and membrane support material in the sound transducing region to a second main surface of the membrane material abutting on the first main surface of the membrane support material.
6 more elements
Dependencies are inferred from the claim text.