Piezo-electric actuators
AssigneeAudio Pixels Ltd.
InventorsShay Kaplan, Yuval Cohen, Daniel Lewin, Meir Ben Simon, Eric Andreas Haber
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Abstract
There is provided a piezo-electric actuator comprising an assembly comprising a first electrode, a second electrode, and at least one piezoelectric layer located between said first electrode and said second electrode, wherein at least one of the first electrode and the second electrode is split into at least two different sub-electrodes, wherein at least part of the assembly is configured to move along an axis perpendicular to a surface of the assembly, in response to an electrical stimulus applied to at least one of said first and second electrodes.
Claims9
A piezo-electric actuator comprising:
- an assembly comprising:
- a first electrode,
- a second electrode, and
- at least one piezoelectric layer located between said first electrode and said second electrode,
- wherein at least one of the first electrode and the second electrode is split into at least two different electrically mutually isolated sub-electrodes, called respectively a first sub-electrode and a second sub-electrode, and
- wherein at least part of the assembly is configured to move upwards or downwards, in response to an electrical stimulus applied to at least one of said first and second electrodes,
- wherein, each of the two sub-electrodes is connected to an electrical supply, wherein the piezo-electric actuator comprises a conductive layer connecting the electrical supply to the second sub-electrode,
- wherein the conductive layer is insulated from the first sub-electrode by an insulating layer, and
- wherein the conductive layer is electrically connected to the second sub-electrode through a via hole present in the insulating layer.
Dependencies are inferred from the claim text.