Low voltage electron transparent pellicle
OwnerJohn Bennettinventor
Life of this patent
Estimating the term…
Abstract
One or more pellicles protect a cathode, the pellicles comprised of a thin layer of material that allows electrons to pass while preventing contamination of the cathode from elements originating beyond the pellicle or contamination of an outside apparatus from elements originating on or near the cathode. The pellicle can be supported by an insulator, the insulator in turn supported by a deflecting layer. The pellicle can be maintained at a positive voltage relative to the cathode, such that a voltage gradient is created between the cathode and the pellicle that accelerates electrons emitted by the cathode away from the cathode. The pellicle is located at an appropriate distance from the cathode to allow electron transmission matching the energy of the electrons at that distance.
Claims19
A system, comprising:
- a cathode;
- an apparatus creating a voltage gradient that becomes more positive as distance from the cathode increases, the cathode possessing a voltage less than 100 volts;
- a vacuum chamber having the cathode and the voltage gradient disposed therein, the vacuum chamber enclosing at least the cathode and the voltage gradient in a vacuum and holding the cathode and the voltage gradient in position such that the voltage gradient originates with and extends from the cathode;
- an electrical circuit, the electrical circuit connected to and supplying a voltage difference between the cathode and apparatus, supporting the voltage gradient;
- and
- one or more pellicle structures, disposed within the vacuum chamber, the one or more pellicle structures disposed between the cathode and the point distant from the cathode and comprising:
- a deflecting structure;
- an insulating structure;
- and
- a pellicle;
- wherein the deflecting structure is in contact with the cathode, the insulating structure is in contact with the deflecting structure without being in contact with the cathode, the deflecting layer coupling the insulating structure and the pellicle without being in contact with the cathode or apparatus, the pellicle being connected to the insulating structure without being in contact with the cathode or apparatus;
- wherein the voltage gradient accelerates electrons emitted by the cathode toward the more positive regions of the gradient;
- and
- wherein the pellicle allows electrons to pass and blocks atomic particles larger than electrons.
A pellicle system for an apparatus having a voltage gradient that becomes more positive as distance from a cathode increases, comprising one or more pellicles;
- wherein at least one of the one or more pellicles encloses the cathode;
- wherein the one or more pellicles allow electrons to pass and block atoms and molecules.
A method of preventing contamination relating to a cathode, comprising:
- the cathode having an emitting side and a non-emitting side, placing a first pellicle in contact with the emitting side of the cathode, the first pellicle allowing electrons to pass and blocking atoms and molecules and further comprising one or more additional pellicles, the one or more additional pellicles disposed opposite the first pellicle and the emitting side of the cathode.
Dependencies are inferred from the claim text.