Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system

A multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system, comprising a first rotating component, a second rotating component, a sliding component, a first single-DOF motion platform, a second single-DOF motion platform and a third single-DOF motion platform, wherein each of the single-DOF motion platforms comprises a base, a non-contact actuator and a guide mechanism;

• wherein the guide mechanism comprises:
• a rigid frame for generating a large-stroke displacement to realize high speed motion;
• a core motion platform arranged in the rigid frame and used for generating a small-stroke precise displacement in the rigid frame under driving of a non-contact actuator;
• a primary flexible hinge group arranged between the rigid frame and both sides of the core motion platform, and used for connecting the core motion platform to the rigid frame, supporting a load of the core motion platform and making the core motion platform generate a precise displacement through deformation along a motion direction;
• and
• a secondary flexible hinge group disposed between the rigid frame and the other two sides of the core motion platform, arranged perpendicular to the primary flexible hinge group, and used for connecting the core motion platform to the rigid frame, improving torsional deformation resistance of the core motion platform and allowing the core motion platform to generate a displacement along the motion direction, wherein flexible hinges of the secondary flexible hinge group are arranged symmetrically relative to the core motion platform;
• and the flexible hinges of the primary flexible hinge group are arranged symmetrically relative to the core motion platform;
• the first rotating component and the sliding component form a rotational sliding motion pair;
• and the rotational sliding motion pair is rigidly connected with the core motion platform in the first single-DOF motion platform and is rigidly connected with a base in the third single-DOF motion platform;
• and
• the second rotating component rigidly connected with a core motion platform in the second single-DOF motion platform and is rigidly connected with the base in the third single-DOF motion platform.