Internal temperature measuring apparatus and temperature difference measuring module
AssigneeOMRON Corporation
InventorShinya Nakagawa
Life of this patent
Estimating the term…
Abstract
An internal temperature measuring apparatus includes a base and a MEMS device disposed on the base. The MEMS device includes a top face and a support. The top face includes a first thermopile configured to measure a first temperature difference used to calculate an internal temperature and a second thermopile configured to measure a second temperature difference used to calculate the internal temperature together with the first temperature difference. An orientation in which a cold junction of each thermocouple constituting the first thermopile is viewed from a hot junction coincides with an orientation in which a cold junction of each thermocouple constituting the second thermopile is viewed from a hot junction.
Claims4
An internal temperature measuring apparatus that measures an internal temperature of a measurement object, the internal temperature measuring apparatus comprising:
- a base in which a first surface is brought into contact with a surface of the measurement object during calculation of the internal temperature of the measurement object;
- a MEMS device disposed on a second surface of the base to measure a first temperature difference and a second temperature difference the MEMS device comprising:
- a top face comprising
- a first thermopile that comprises a plurality of thermocouples configured to measure the first temperature difference, and
- a second thermopile that comprises a plurality of thermocouples configured to measure the second temperature difference;
- and
- a support supporting the top face and comprising at least one cavity, wherein:
- each of the plurality of thermocouples of the first thermopile is oriented such that a cold junction of the thermocouple is positioned on a portion of the top face positioned on the at least one cavity and a hot junction of the thermocouple is positioned the top face;
- and
- each of the plurality of thermocouples of the second thermopile is oriented in a same direction as the first thermopile such that a cold junction of the thermocouple is positioned on a portion of the top face positioned on the at least one cavity and a hot junction of the thermocouple is positioned on the top face;
- and
- an arithmetic circuit configured to calculate the internal temperature of the measurement object based on the first temperature difference and the second temperature difference.
A temperature difference measuring module that measures a first temperature difference and a second temperature difference, the first temperature difference and the second temperature difference being used to calculate an internal temperature of a measurement object, the temperature difference measuring module comprising:
- a package having a bottomed tubular shape comprising a plurality of leads;
- and
- a MEMS device disposed on an inner bottom surface of the package, the MEMS device comprising:
- a top face comprising a first thermopile configured to measure the first temperature difference and a second thermopile configured to measure the second temperature difference;
- and
- a support supporting the top face and comprising a plurality of cavities, wherein:
- each thermocouple comprised in the first thermopile is oriented such that a cold junction of the thermocouple is positioned on a portion of the top face positioned on one of the plurality of cavities and a hot junction of the thermocouple is positioned on the top face;
- and
- each thermocouple comprised in the second thermopile is oriented in a same direction as the first thermopile such that a cold junction of the thermocouple is positioned on a portion of the top face positioned on one of the plurality of cavities and a hot junction of the thermocouple is positioned on the top face;
- and
- an arithmetic circuit configured to calculate the internal temperature of the measurement object based on the first temperature difference and the second temperature difference.
Dependencies are inferred from the claim text.