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US 10,559,395 B2Granted
Optimization of high resolution digitally encoded laser scanners for fine feature marking
AssigneenLIGHT, Inc.
InventorKen Gross
Life of this patent
Estimating the term…
Abstract
Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.
Claims20
A method, comprising:
- selecting a laser beam diameter;
- situating a substrate to be scanned at a scan plane associated with the selected laser beam diameter;
- exposing the substrate to a laser beam with the selected laser beam diameter by scanning the laser beam with respect to the substrate, wherein the laser beam is scanned with angular scan increments corresponding to less than 1/10 of the laser beam diameter at the scan plane.
An apparatus, comprising:
- a laser configured to produce a processing beam;
- an optical system situated to receive the processing beam;
- and
- a scan controller configured to control the optical system to scan the processing laser beam with respect to a scan area of a substrate, wherein the processing laser beam is scanned with angular scan increments corresponding to less than 1/10 of a processing beam diameter at the scan area.
1 more element
An apparatus, comprising:
- a laser configured to produce a processing beam;
- an optical system situated to receive the processing beam;
- and
- a scan controller configured to control the optical system to scan the laser beam with respect to a scan area of a substrate so as to produce an exposed scan vector, wherein a transverse offset between the exposed scan vector and an intended scan vector is less than 1/10 of a diameter of the laser beam at the scan area.
1 more element
Dependencies are inferred from the claim text.