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US 10,557,827 B2Granted
Electrostatically actuated torsional resonant sensors and switches
AssigneeKing Abdullah University of Science and Technology
InventorMohammad Ibrahim Younis
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Abstract
Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.
Claims20
A torsional resonator sensor apparatus comprising:
- a resonator structure comprising a beam suspended above a substrate, the beam having a switching element at an actuated end and a sensor surface at an un-actuated end, wherein the resonator structure is configured to detect a mass of a particular agent that becomes in contact with the sensor surface;
- and
- AC and DC voltage sources that are coupled to the resonator structure and are configured to drive the resonator structure to resonate in a stable state at an operating frequency, wherein the resonator structure is configured to cause a resonance frequency shift for the resonator structure to lower values after contact of the particular agent with the sensor surface,
- wherein the beam is suspended above the substrate with torsional support members so that (1) there is an electrode area located on the substrate, next to the actuated end, and (2) there is no electrode located on the substrate, next to the un-actuated end,
- wherein the torsional support members are attached to the beam between the actuated end and the un-actuated end, and
- wherein the switching element is configured to be activated upon the contact of the sensor surface with the particular agent having a mass above a predefined level that causes the operating frequency to fall within a shifted pull-in frequency band for the resonator structure due to the contact of the particular agent with the sensor surface.
3 more elements
A method comprising:
- providing a resonator structure comprising a beam suspended above a substrate, the beam having a sensor surface, at an un-actuated end of the beam, configured to detect a mass of a particular agent that becomes in contact with the sensor surface, and a switching element at an actuated end of the beam;
- coupling AC and DC voltage sources to the resonator structure that are configured to drive the resonator structure to resonate in a stable state at an operating frequency, wherein the resonator structure is configured to cause a resonance frequency shift for the resonator structure to lower values after contact of the particular agent with the sensor surface;
- and
- activating the switching element of the resonator structure upon the contact of the sensor surface with the particular agent having a mass above a predefined level that causes the operating frequency to fall within a shifted pull-in frequency band for the resonator structure due to the contact of the particular agent with the sensor surface, wherein the switching element is configured to complete a circuit with a load element after being activated,
- wherein the beam is suspended above the substrate with torsional support members so that (1) there is an electrode area located on the substrate, next to the actuated end, and (2) there is no electrode located on the substrate, next to the un-actuated end, and
- wherein the torsional support members are attached to the beam, between the actuated end and the un-actuated end.
3 more elements
Dependencies are inferred from the claim text.