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US 10,551,333 B2Granted
Heat flux sensor that implements at least one optical resonator, gas sensor and Pirani gauge comprising at least one such sensor
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorLaurent Duraffourg
Life of this patent
Estimating the term…
Abstract
A heat flux sensor including at least one optical resonator, suspended on a support, the optical resonator intended to be suspended in a gaseous environment, at least one first device intended to introduce a measurement light beam into the waveguide, at least one second collection device, intended to collect a detection light beam coming from the optical resonator and a device for heating of the optical resonator.
Claims25
A heat flux sensor comprising:
- at least one optical resonator suspended on a support by at least one suspension element configured to thermally isolate the suspension element from the support, said optical resonator being configured to be suspended in a surrounding gaseous environment to be measured by the sensor, said optical resonator being configured to be sensitive to heat exchanges with the surrounding gaseous environment,
- said at least one optical resonator comprising
- at least one waveguide,
- at least one introduction device for introducing a measurement light beam into the waveguide,
- at least one collector configured to collect a detection light beam coming from the at least one waveguide, and
- at least one heater for heating said at least one optical resonator.
3 more elements
Dependencies are inferred from the claim text.