Measuring head
AssigneeMitutoyo Corporation
InventorsSadayuki Matsumiya, Tomoyuki Miyazaki, Shuichi Kamiyama, Hideyuki Arai
Life of this patent
Estimating the term…
Abstract
A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be movable by the second slide mechanism; a probe held to be movable by the third slide mechanism; pneumatic cylinders for connecting slider parts and guide parts included in each slide mechanism; and automatic pressure regulators for respectively changing air pressures supplied to each pneumatic cylinder in accordance with measurement postures of the measuring head.
Claims4
A measuring head comprising:
- a first slide mechanism having a first slider, a first guide for guiding the first slider, and a first motor for driving the first slider for sliding along a first measurement axis;
- a second slide mechanism having a second slider, a second guide fixed to the first slider for guiding the second slider, and a second motor for driving the second slider for sliding along a second measurement axis which is not parallel to the first measurement axis;
- and
- a probe held by the second slider for detecting a work;
- making the probe to detect a work surface in accordance with the movement of the respective sliders;
- and
- being detachable to any external moving device via the first guide,
- wherein the first slide mechanism has a first fluid pressure cylinder connecting the first slider and the first guide and being extendable and contractible in the first measurement axis direction, and a first fluid pressure changer for changing pressure of fluid provided to the first fluid pressure cylinder in accordance with a measurement posture of the measuring head;
- wherein the second slide mechanism has a second fluid pressure cylinder connecting the second slider and the second guide and being extendable and contractible in the second measurement axis direction, and a second fluid pressure changer for changing pressure of fluid provided to the second fluid pressure cylinder in accordance with a measurement posture of the measuring head.
Dependencies are inferred from the claim text.