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US 10,544,483 B2Granted
Scalable processes for forming tin nanoparticles, compositions containing tin nanoparticles, and applications utilizing same
AssigneeLockheed Martin Corporation
InventorsRandall M. Stoltenberg, Alfred A. Zinn
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Abstract
A method includes providing nanoparticles having a tin coating surrounding a metal nucleus, such as copper. The nucleus forms first and acts as a seed growing into nanoparticles with a tin coating and a nucleus. The nanoparticles are at least partially vaporized, thereby producing vaporized tin ions. An emission of extreme ultraviolet (EUV) radiation is generated from the vaporized tin ions.
Claims7
A method comprising:
- providing nanoparticles having a tin coating surrounding a nucleus, wherein the nucleus is formed from an insoluble nanoparticle seed, and the nanoparticles comprise at least one surfactant;
- at least partially vaporizing the nanoparticles, thereby producing vaporized tin ions;
- and
- generating an emission of extreme ultraviolet (EUV) radiation from the vaporized tin ions.
1 more element
A method comprising:
- providing nanoparticles having a tin coating surrounding a nucleus, wherein the nanoparticles comprise at least one surfactant;
- at least partially vaporizing the nanoparticles, thereby producing vaporized tin ions;
- and
- generating an emission of extreme ultraviolet (EUV) radiation from the vaporized tin ions.
1 more element
Dependencies are inferred from the claim text.