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US 10,544,039 B2Granted
Methods for depositing a measured amount of a species in a sealed cavity
AssigneeTexas Instruments Incorporated
InventorsBenjamin Stassen Cook, Kurt Wachtler, Adam Joseph Fruehling, Juan Alejandro Herbsommer, Simon Joshua Jacobs
Life of this patent
Estimating the term…
Abstract
Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.
Claims20
A method, comprising:
- depositing a microcapsule in a cavity of a semiconductor substrate, wherein the microcapsule contains an amount of a fluid;
- sealing the cavity after the microcapsule is deposited;
- and
- rupturing, after the cavity is sealed, the microcapsule to release molecules of the fluid into the cavity.
1 more element
A method, comprising:
- forming a cavity semiconductor in a substrate material;
- depositing a film on a surface of the cavity;
- sealing the cavity after the film is deposited;
- and
- decomposing the film to form molecules of a vapor in the sealed cavity.
2 more elements
A method comprising:
- forming a cavity semiconductor in a substrate material;
- depositing a getter material on a surface of the cavity;
- exposing the getter material to molecules of a vapor, wherein the getter material adsorbs the molecules;
- evacuating the vapor from the cavity;
- sealing the cavity after the vapor is evacuated from the cavity;
- and
- releasing the molecules from the getter material to provide molecules of the vapor in the sealed cavity.
4 more elements
Dependencies are inferred from the claim text.