US 10,541,671 B2Granted

Vibration device

AssigneeKabushiki Kaisha Toshiba

InventorsTamio Ikehashi, Shunta Maeda, Ryunosuke Gando, Yasushi Tomizawa

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Abstract

According to one embodiment, a vibration device includes a first movable unit including first and second movable portions arranged in a direction parallel to a first axis and enabled to vibrate in the direction parallel to the first axis, a second movable unit enabled to vibrate in a direction parallel to a second axis perpendicular to the first axis, and a connection unit configured to connect the first and second movable units together, wherein the following relationship is satisfied fi>(1+1/(2Qa))fa where a resonant frequency of the first movable unit in an in-phase mode is denoted by fi, a resonant frequency of the first movable unit in an anti-phase mode is denoted by fa, and a Q factor of resonance of the first movable unit in the anti-phase mode is denoted by Qa.

Claims13

Dependent claims

A vibration device comprising:

a first movable unit including a first movable portion and a second movable portion arranged in a direction parallel to a first axis and enabled to vibrate in the direction parallel to the first axis;
a second movable unit enabled to vibrate in a direction parallel to a second axis perpendicular to the first axis;
a connection unit configured to connect the first movable unit and the second movable unit together, wherein
the following relationship is satisfied:
fi>(1+1/(2Qa))fa
where a resonant frequency of the first movable unit in an in-phase mode is denoted by fi, a resonant frequency of the first movable unit in an anti-phase mode is denoted by fa, and a Q factor of resonance of the first movable unit in the anti-phase mode is denoted by Qa, and
wherein the following relationship is satisfied:
fi>(1+1/(2Qs))fs
where a resonant frequency of sense vibration of the first movable unit for detecting a Coriolis force applied to the first movable unit and a Q factor of resonance are denoted by fs and Qs, respectively.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/705,202Filed 14 Sep 2017
Priority: JP 2016-2389038 Dec 2016
Published: US 2018/0167053 A114 Jun 2018
Granted: 21 Jan 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

H03H 9/2468
Of microelectro-mechanical resonators: tuning fork resonators
G01C 19/5621
Using vibrating tuning forks: the devices involving a micromechanical structure
G01C 19/574
Structural details or topology: the devices having two sensing masses in anti-phase motion
H03H
Impedance networks