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US 10,541,670 B2Granted
Micromechanical resonator and resonator system including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYongseop Yoon, Sungchan Kang, Cheheung Kim, Sangha Park, Choongho Rhee, Hyeokki Hong
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Abstract
Provided are micromechanical resonators and resonator systems including the micromechanical resonators. The micromechanical resonators may each include a supporting beam including a fixed end fixed on a supporting member and a loose end configured to vibrate, and a lumped mass arranged on the loose end, wherein the loose end has a width greater than a width of the fixed end, and a width of the lumped mass is greater than that the width of the fixed end.
Claims15
A micromechanical resonator comprising:
- a supporting beam comprising a fixed end fixed on a supporting member and a loose end configured to vibrate;
- and
- a lumped mass arranged on the loose end,
- wherein the loose end has a width greater than a width of the fixed end, and a width of the lumped mass is greater than the width of the fixed end,
- wherein the loose end comprises a first air flow path configured to allow air to flow therethrough in an upward direction and a downward direction, and the lumped mass comprises a second air flow path configured to allow air to flow therethrough in the upward direction and the downward direction, and
- wherein the first air flow path overlaps the second air flow path, and
- wherein the first airflow path and the second air flow path each have a width equal to or greater than 10 μm and smaller than the width of the fixed end.
4 more elements
A resonator system comprising:
- a supporting member;
- and
- a plurality of micromechanical resonators, each having an end fixed on the supporting member and having resonance frequencies different from each other,
- wherein the plurality of micromechanical resonators comprise a first micromechanical resonator, a second micromechanical resonator having a length greater than that of the first micromechanical resonator, and a third micromechanical resonator having a length greater than that of the second micromechanical resonator, and,
- wherein the third micromechanical resonator comprises:
- a first supporting beam comprising a first fixed end fixed on the supporting member and a first loose end configured to vibrate and has a width greater than a width of the first fixed end, and
- a first lumped mass that is arranged on the first loose end and has a width greater than the width of the first fixed end,
- wherein the first loose end comprises a first air flow path configured to allow air to flow therethrough in an upward direction and a downward direction, and the first lumped mass comprises a second air flow path configured to allow air to flow therethrough in the upward direction and the downward direction, and
- wherein the first air flow path overlaps the second air flow path, and
- wherein the first airflow path and the second air flow path each have a width equal to or greater than 10 μm and smaller than the width of the fixed end.
7 more elements
Dependencies are inferred from the claim text.